MEMS development

DMG-1

Micromechanical gyroscope DMG-1

Development of technologies and production of silicon sensitive elements of MEMS gyroscope and MEMS accelerometer are performed by Physical and Technical Institute of Russian Academy of Sciences (Moscow).

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PURPOSE

The micromechanical gyroscope is designed for use as a rate sensor in automotive industry, robotics, sports trainers, therapeutic equipment, virtual reality systems, household appliances, toys.

PREFERENCE

— The micromechanical gyroscope consists of a silicon sensor and an electronic unit.

PERFORMANCE

Measurement Range ±100°/s
Error of Scale Factor within a given temperature range ± 3.0%
Nonlinearity of Scale Factor ± 1.0%
Change of Constant Component within a given temperature range ± 2.0°/s
Constant Component of Drift ± 0.3°/s
Random Component of Drift 0.1°/s
Supply Voltage 5 V
Environmental Conditions – 40°С + 85°С
Dimensions of:
- Sensor
- Gyro

d 26 х 12 mm
35 х 35 х 30 mm
Gyro Weight 40 g
BINS-MM

Micromechanical Strapdown Inertial Navigation System BINS-MM

The system is intended to determine and output coordinates, linear accelerations, orientation angles and components of linear acceleration and angular velocity vectors.

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FEATURES

—The system is based on micromechanical inertial sensors.

— It is integrated with a satellite navigation system, a flux gate detector and a pressure altimeter.

— The unique methods and algorithms applied for calibration and compensation of errors provide high output parameters of the system.

— Small dimensions.

SCOPE OF APPLICATION

— Standby aircraft navigation system

— Navigation systems for motor vehicles

- Missile control system

— Control and navigation systems of ground vehicles and robots

PERFORMANCE

  Angular velocity Acceleration
Input Range 400 °/s < 10g
Scale Factor Errors 0.20 % 0.20 %
Instability of Zero Signal:
In Run
From Run to Run

0.005 °/s
0.050 °/s

0.002 g
0.020 g
Operating Mode BINS/SNS Self-contained BINS within 3 minutes
Errors:
- Coordinates 30.0 m 200 m
- Speeds 0.3 m/s 3.0 m/s
- Orientation Angles 0.5° 1.0°
- Track Angle (Heading) 0.4° 2.0°
Power Supply 27 V  
Interface RS-422, RS-232  
Dimensions 85 х 85 х 100 mm  
Weight 0.6 kg  
Operating Temperature Range - 40 ... + 60°С  
A-101

Micromechanical Accelerometer A-101

Development of technologies and production of silicon sensitive elements of MEMS gyroscope and MEMS accelerometer are performed by Physical and Technical Institute of Russian Academy of Sciences (Moscow).

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PURPOSE

The micromechanical three-axis accelerometer A-101 is designed for measurement of linear acceleration along three axes simultaneously. The accelerometer consists of a three-axis assembly of micromechanical silicon sensors and an electronic unit.

PREFERENCE

—The microaccelerometer A-101 can be used in automotive industry, oil and gas pipeline control systems, robotics, sports trainers, therapeutic equipment, virtual reality systems, household appliances, in toys.

PERFORMANCE

Measurement Range ± 10 g
Error of Scale Factor within a given temperature range ± 3.0 %
Nonlinearity of Scale Factor ± 1.0 %
Stability of Zero Signal ± 0.02 g
Change of Zero Signal within a given temperature range ± 0.1 g
Supply Voltage 5 V
Environmental Conditions – 40°С ….+85°С
Dimensions d 40 х 30 mm
Weight 50 g